Finishing characteristics of brittle materials by elidlap. Application of elid grinding technique to precision. United grinding is your solutions partner, with products and services designed to assist you throughout the life cycle of your cnc grinding machine, including equipment sales, installation, training, applications support, preventive and predictive maintenance, parts and repair services. In the paper the state of the passivating film on the grinding wheel surface was characterized by the loop current, the strategies actively controlling the film state, discontinuous inprocess electrolyzing and intermittent grinding were put forward, and the elid grinding tests under the conditions of actively. A grinding method which uses specific metallic bond fine grit wheels and electrolytic in process dressing elid is proposed for the effectual mirror surface. Recent studies show that the combination of elid and edm. Elid grinding of sintered sic mirror is successfully carried out using ultraprecision rotary grinder, and high surface quality was obtained. In this study, ceo2, sio2, fe2o3 and mgo soft abrasives are used in the design of soft.
Electrolytic inprocess dressing elid is an efficient method to dress the grinding wheel while performing grinding. Proceedings of the asme 2009 international manufacturing science and engineering conference. International journal of machine tools and manufacture. Nano finish grinding of brittle materials using electrolytic inprocess dressing elid technique. Several sets of experiments have been performed to determine the optimal grinding conditions. The state of the passivating film is a key factor affecting elid grinding. Pdf electrolytic inprocess dressing elid grinding and.
Elid grinding has been used in experiments with many materials including ceramics, glass, and biomedical materials. The article, at first, focuses on the newly developed method for grinding of hard and brittle materials, called elid electrolytic in process. Elid grinding with lapping kinematics sciencedirect. But, due to the very thin mirror, profile deformation occurred. A gist of the important research milestones on the process has been organized in this report. The wheel wear mechanism in elid grinding of sapphire is dominated by bond fracture because the bond strength is reduced by electrolysis. Elid lap grinding was performed on brittle materials such as silicon and glass bk 7 with wheels of different grit sizes. A study on the grinding of glass using electrolytic in. The elid grinding process is the combination of an electrolytic process.
Super abrasive diamond grinding wheels and elid are used to produce a mirror of 1m length with an average surface finish of less than 10 nm. Click download or read online button to get handbook of ceramics grinding and polishing book now. The silicon wafer workpiece was held on a rotary table. Grinding force was less in elid grinding than in conventional grinding. Elid grinding characteristics of glassceramic materials. The grinding wheel profile obtained after truing using on machine truing shows an accuracy of 3 m.
The grinding wheel is connected to the pole of the positive elid power supply fuji elider 921 through a brush contact at the wheel center. Elid grinding with lapping kinematics produces no thermal damage or burn to either the grinding wheel or the workpiece due to the low speed of the operation. Efficient dressing of the wheel in elid grinding by controllable. Elid grinding and edm for finish machining t saleh and r bahar, international islamic university malaysia, kuala lumpur, malaysia r 2016 elsevier inc.
This setup would make it possible to grind a large wafer without using a large grinding wheel. The numerical calculation results by fem agree with the results by elid grinding. As prepolishing, in elid grinding, good surface quality may be obtained in high efficiency, and then, the last high form accuracy and surface roughness may be obtained by mrf. In addition, elid grinding of silicon wafers was done on a horizontal spindle surface grinding machine using a straight type wheel, as shown in fig. To fulfil this, several measures have been taken and preliminary experiments have been carried out to prove its feasibility. Elid electrolytic inprocess dressing grinding is a new ultraprecision machining technique which employs inprocess electrolysis to dress the metal bond diamond wheel in grinding process.
In this paper, a fundamental study on the mechanism of the elid grinding technique is discussed in detail. Click download or read online button to get handbook of ceramic grinding and polishing book now. Elid supported grinding of thin sapphire wafers request pdf. Igor makarenko, christian vogt, rolf rascher, peter sperber, and thomas stirner elid supported grinding of thin sapphire wafers. Electrolytic inprocess dressing elid grinding is a well established technology for achieving highest quality surface finish on hard and brittle materials such as optical glass, ceramics, and silicon compounds. The development of an expert system when elid grinding hard materials. Electrolytic inprocess dressing elid grinding is a new method for achieving ultraprecision surface on. Given elid precision mirror grinding technology has effectively solved the basis of many of the typical flatprecision machining difficult materials and efficient processing, through the conversion process equipment.
Surface roughness characteristics of fine elid cross. The development and research of the special elid grinding. Based on the existing experimental results of elid grinding, according to the structure characteristics of the existing grinding machine, we designed and developed a special elid grinding machine in order to greatly improve the machining precision and. Sapphire material is, due to its crystal structure, difficult to machine in an economic way.
A study on electrolytic inprocess dressing elid grinding of sapphire with acoustic emission. The oxides have an insulating effect and lower the current which. A nanometreprecision, ultrastiff plezostepper stage for elid grinding. Handbook of ceramic grinding and polishing download. Elid dressing behaviour of fine grained bronze bonded. In this paper, the principle of elid grinding is introduced. Cast iron bonded grinding wheels are predominantly used for the elid grinding process because of their superior oxidising behaviour. Grinding force increased continuously during conventional grinding. Comparison of ground surfaces by polishing and elid lap grinding. The basic components of the process, machine tool, power supply, grinding wheel, electrode and electrolytes, have also undergone several. Elid fine grinding of sapphire rollers with emphasis on. Elid grinding principle in elid grinding a metallic grinding wheel maintains its sharpness through an electrolytic passivation process. Ultraprecision finishing process integrated elid grinding.
The objective of this study is to design and evaluate soft abrasive wheels for silicon wafer grinding. A knowledge based feedback control system for precision elid grinding. Pdf elid grinding and edm for finish machining researchgate. In order to explore the new way to precision machining of the cylindrical, elid precision mirror grinding technology are employed to precision ultraprecision grinding experiments. Elid grinding free download as powerpoint presentation. Elidgrinding of hardened steel for industrial applications. Research on cylindrical precision machining adopting elid. Finishing of new materials for the required stringent specification stated by those industrial applications emerges the innovation. Read elid grinding characteristics of glassceramic materials, international journal of machine tools and manufacture on deepdyve, the largest online rental service for scholarly research with thousands of academic publications available at your fingertips. The hybrid process of elid grinding has a simultaneous electrolytic reaction and grinding action. Elid grinding based on the state control of passivating films. The wheel wear mechanism in elid grinding of sapphire is dominated by bond. Author links open overlay panel shaohui yin a hitoshi ohmori b yutang dai c yoshihiro uehara b fengjun chen a hengning tang a. Elid grinding is recommended for lowrigidity machine tools and lowrigidity workpieces.
The outer part of the iron bonding is dissolved to form a passivating layer of oxides and hydroxides. Elid grinding technology applied to difficulttomachine materials precision and ultraprecision processing has obtained good results. International journal of machine tools manufacture, 40 2000, pp. Asme 2009 international manufacturing science and engineering conference, volume 1. Request pdf surface roughness characteristics of fine elid cross grinding for silicon wafers silicon is widely used as the most important substrate material in integrated circuit and micro. Handbook of ceramics grinding and polishing download. Results indicate that the acoustic emission technique has the potential to be used for monitoring the elid grinding process, detecting the condition of the grinding wheel, and investigating the.
Electrolytic inprocess dressing elid grinding for nanosurface generation chapter pdf available january 2014 with 2,553 reads how we measure reads. Elid supported grinding of thin sapphire wafers elid supported grinding of thin sapphire wafers makarenko, igor 20101006 00. Finishing characteristics of brittle materials by elid lap grinding using metalresin bonded wheels. Elid grinding favors high rates of material removal. The development of an expert system when elid grinding hard. Elid grinding grinding abrasive cutting machining scribd. Download as ppt, pdf, txt or read online from scribd. Elid grinding of sic ultra lightweight mirror hiroaki eto 1, yutang dai, noboru ebizuka, yasutaka saito, toru suzuki 1, weimin lin 1, hitoshi ohmori, toshikazu ebisuzaki, hideki takami2 1 riken the institute of physical and chemical research, 21, hrosawa, wako, saitama, 3150198, japan. Elid lap grinding is an extension of the elid grinding technology. Newer materials with excellent properties are of recent interest in the optical, electrical and electronics industries. Elid grinding, since its introduction over two decades ago, has helped in material removal of hard and difficulttocut engineering materials. To grind sapphire the materials behavior is additionally to be considered. An outer peripheral portion of the wheel 10 includes a conductive elastic member 11 and abrasion. Elid grinding, as prefinishing, was employed to obtain high efficiency and high surface quality.
In conventional elid grinding, constant voltage is applied on the metalbonded diamond wheels to ensure constant protrusion of super fine cutting grits throughout the grinding cycle. Authors tursunbaev sarvar anvarovich, school of mechanical and electrical engineering, harbin institute of technology, china. An important feature of the elid grinding is that it can be retro. Development of an onmachine profile measurement system in.
In this study, the grinding experiments were conducted on sic particlereinforced aluminum matrix sicpal composites under wet, dry, cryogenic, and elid grinding conditions, and the effects of grinding depth and table speed on grinding forces and grinding force ratio were investigated. Chapter 09158 elid grinding and edm for finish machining. Pdf electrolytic inprocess dressing elid grinding for nano. Elid system consists of a metalbonded diamond grinding wheel, an electrode, a power supply and an electrolyte. This site is like a library, use search box in the widget to get ebook that you want. Elid grinding requires exactly aligned machining parameters of the grinding process. Table 1 summarizes the type of machines that have been used for elid grinding of silicon wafers. An optical glass sample is ground by using cast iron bond diamond wheel and elid technique. It is a method of constant pressure grinding which employs the electrically conductive bonded wheel and electrolytic inprocess dressing elid. Advanced elid process development for grinding silicon. A study on electrolytic inprocess dressing elid grinding of. An outer surface of the workpiece is subjected to elid grinding by using a conductive grinding wheel 4. Pdf development of an onmachine profile measurement system in elid grinding for machining aspheric surface with software compensation published version restricted to registered users only download 1mb request a copy.
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